Rashid Ahmed Rifat

Engineer & Researcher



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Rashid Ahmed Rifat

Ph.D Researcher, Battery Innovation Centre, MOBI, VUB | Erasmus Mundus Scholar 2021-2023



Dept. Electrical Engineering & Energy Technology

Vrije Universiteit Brussel




Rashid Ahmed Rifat

Engineer & Researcher



Dept. Electrical Engineering & Energy Technology

Vrije Universiteit Brussel



SSI Design Lab II: Manufacturing Processes for Smart Systems Lab


Abstract: USN’s MST - Lab is a research laboratory cleanroom; all personnel must adhere to safety guidelines and wear proper cleanroom suits before conducting any experiments. For the SSI Design Lab II (Microfabrication) course, lab experiments were carried out encompassing six processes with sputtering, photolithography, and wet/dry etching. Three different wafers were successfully fabricated; two square structures and one to be used by BioMEMS course students. Each process was evaluated by taking measurements using a profilometer or an ellipsometer; some inconsistencies were found along the whole process during the evaluation. Such findings are discussed in this paper. The resulting wafers exhibited satisfactory properties such as expected from the entire process chain.
Keywords—Ellipsometry, Profilometry, Photolithography, Magnetron Sputtering, Gold Etching, Reactive Ion Etching, Anisotropic Wet Etching



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